Liquid-Borne Particle Sensor KS-41A
Aerospace
Ideal for Monitoring 0.15 μm Particles in Photoresist, SOG, and Other Solutions.
Key Features
- Detects particles in photoresist down to 0.15µm size, at a flow rate of 10mL per minute
- Four particle size ranges(4 channels, factory default setting) ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
- Integrated leak sensor with alarm output
- User selectable channels within measurement range (using KE-40B1 function)
